Published 1999 | Version v1
Miscellaneous Open

High resolution detection of hydrogen in thin films

Creators

  • 1. Australian National University, Canberra, ACT (Australia). Research School of Physical Science, Department of Electronic Materials Engineering
  • 2. Australian National University, Canberra, ACT (Australia). Research School of Physical Science, Department of Electronic Materials Engineering and Department of Nuclear Physics
  • 3. Australian National University, Canberra, ACT (Australia). Research School of Physical Science, Department of Nuclear Physics
  • 4. Commonwealth Scientific and Industrial Research Organisation (CSIRO), Lindfield, NSW (Australia). Telecommunications and Industrial Physics

Description

It is well known that elastic recoil protons can be detected with high energy resolution, and therefore optimum depth resolution, using magnetic spectrometers. Moreover, substantial acceptance is obtained with spectrometers that allow kinematic compensation. The measurements to be described illustrate the potential capabilities of the ANU Enge splitpole spectrometer for high resolution surface depth profiling. They are presented to stimulate possible application requiring surface analysis with 2-5 nm resolution

Files

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Part of:
The 11th Australian Conference on Nuclear Techniques of Analysis and the 5th Vacuum Society of Australia Congress. Proceedings

Additional details

Publishing Information

Imprint Place
Lucas Heights (Australia)
Imprint Title
The 11th Australian Conference on Nuclear Techniques of Analysis and the 5th Vacuum Society of Australia Congress. Proceedings
Imprint Pagination
310 p.
Journal Page Range
p. 117-119
Report number
INIS-AU--0043

Conference

Title
11. Australian Conference on Nuclear Techniques of Analysis; 5. Vacuum Society of Australia Congress
Dates
24-26 Nov 1999
Place
Lucas Heights, NSW (Australia)

INIS

Country of Publication
Australia
Country of Input or Organization
Australia
INIS RN
31026629
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, Numerical Data
Descriptors DEI
ELASTIC SCATTERING; EXPERIMENTAL DATA; GOLD 197 BEAMS; HYDROCARBONS; ION SCATTERING ANALYSIS; MEV RANGE 100-1000; PROTON DETECTION; RECOILS; SPATIAL RESOLUTION; THIN FILMS
Descriptors DEC
BEAMS; CHARGED PARTICLE DETECTION; CHEMICAL ANALYSIS; DATA; DETECTION; ENERGY RANGE; FILMS; INFORMATION; ION BEAMS; MEV RANGE; NONDESTRUCTIVE ANALYSIS; NUMERICAL DATA; ORGANIC COMPOUNDS; RADIATION DETECTION; RESOLUTION; SCATTERING

Optional Information

Notes
2 refs., 2 figs.