Published February 15, 1992
| Version v1
Journal article
Optical end point detection of etched YBCO films
Creators
- 1. Inst. fuer Electrotechnische Grundlagen der Informatik, Univ. Karlsruhe (Germany)
Description
A simple end point detection method for dry etching of YBCO layers on uniform substrates is presented. Reflectivity measurements of the etched layer with a He-Ne laser beam provides process control and end point detection. A possible application of this method to YBCO layers on substrates with buffer layers is discussed. (orig.)
Additional details
Additional titles
- Augmented title (English)
- Y-Ba-Cu-O
Publishing Information
- Journal Title
- Physica. C, Superconductivity
- Journal Volume
- 191
- Journal Issue
- 3/4
- Series
- Phys., C Supercond.
- Journal Page Range
- 525-529
- ISSN
- 0921-4534
- CODEN
- PHYCE
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Netherlands
- INIS RN
- 23070535
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- BARIUM OXIDES; COPPER OXIDES; DETECTION; ETCHING; FILMS; HELIUM-NEON LASERS; HIGH-TC SUPERCONDUCTORS; LASER RADIATION; PROCESS CONTROL; QUATERNARY COMPOUNDS; REFLECTIVITY; SUBSTRATES; YTTRIUM OXIDES
- Descriptors DEC
- ALKALINE EARTH METAL COMPOUNDS; AMINES; AMPLIFIERS; BARIUM COMPOUNDS; CHALCOGENIDES; CONTROL; COPPER COMPOUNDS; ELECTROMAGNETIC RADIATION; EQUIPMENT; GAS LASERS; LASERS; OPTICAL PROPERTIES; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; RADIATIONS; SUPERCONDUCTORS; SURFACE PROPERTIES; TRANSITION ELEMENT COMPOUNDS; YTTRIUM COMPOUNDS