Published January 1998 | Version v1
Journal article

Total dose γ-ray radiation characteristics of P-channel MOSFET/FIPOS

  • 1. Fudan Univ., Shanghai (China)
  • 2. Academia Sinica, Urumqi (China). Xinjiang Inst. of Physics

Description

The high quality SOI(silicon on insulator) materials were prepared with highly selective and self-stopping full isolation by porous oxidized silicon (FIPOS) technology. The PMOSFETs with different channel lengths wee fabricated by the 2 μm CMOS process on the SOI wafers and their total dose 60Co γ-ray radiation characteristics were studied. The results show that the devices remain functional after 5 kGy(Si) dose radiation, but the threshold voltage has a significant shift. The main factor causing this shift is the radiation-induced trapped-oxide charge in the gate oxide layer. The devices with different channel lengths have similar radiation characteristics. After room-temperature annealing for several hours, the threshold voltage has a little back-shift

Additional details

Publishing Information

Journal Title
Nuclear Techniques
Journal Volume
21
Journal Issue
1
Journal Page Range
p. 43-47.
ISSN
0253-3219
CODEN
NUTEDL