Published November 1974 | Version v1
Journal article Metadata-only

Combined ESCA/Auger system based on the double pass cylindrical mirror analyzer

Creators

  • 1. Physical Electronics Industries, Inc., Edina, Minn. (USA)

Description

A double-pass cylindrical mirror analyzer with retarding grids is described, which functions with high sensitivity as an Auger spectrometer and also has adequate luminosity for ESCA applications. In addition to the obvious advantage of allowing ESCA and AES measurements with the same analyzer, this system has several other unique features such as selected area analysis, sample flexibility and simultaneous sputter etching. (Auth.)

Additional details

Identifiers

DOI
10.1016/0368-2048(74)85046-2;

Publishing Information

Journal Title
Journal of Electron Spectroscopy and Related Phenomena
Journal Volume
5
Journal Issue
1
Series
J. Electron Spectrosc. Relat. Phenom.
Journal Page Range
691-703
ISSN
0368-2048

Conference

Title
International conference on electron spectroscopy.
Dates
16 Apr 1974.
Place
Namur, Belgium.

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
7249476
Subject category
S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
AUGER EFFECT; ELECTRON SPECTROMETERS; ELECTROSTATIC ANALYZERS; ENERGY SPECTRA; GRIDS; LUMINOSITY; PERFORMANCE; PHOTOELECTRON SPECTROSCOPY; SENSITIVITY; X-RAY SOURCES
Descriptors DEC
BEAM ANALYZERS; ELECTRODES; ELECTRON SPECTROSCOPY; MEASURING INSTRUMENTS; OPTICAL PROPERTIES; PHYSICAL PROPERTIES; RADIATION SOURCES; SPECTRA; SPECTROMETERS; SPECTROSCOPY; X-RAY EQUIPMENT

Optional Information

Notes
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