Effect of temperature on the growth of carbon nanostructures using various gases on copper substrate in PECVD chamber

The goal of this work would be to observe the carbon deposition during carbon nanostructure growth on copper substrate in plasma enhanced chemical vapor deposition (PECVD) system containing Argon, Acetylene and Hydrogen gases and observe the variation in growth with change in temperature. In this regard, many numerical simulations will have to be carried out using 2D axis-symmetrical inductively coupled plasma module in COMSOL multi physics 5.3 simulation software. From the simulation outcomes, we would try to investigate the variations in the electron density, electron temperature, electric potential and plasma power with an increase in temperature. The number densities of various dominant ions and neutrals will be recorded with respect to an increase in temperature. The carbon deposition on the substrate would be shown with the help of 3D diagrams to better understand the variations in growth with change in temperature. (author)