Published November 2005
| Version v1
Journal article
A compact nanopositioning stage with high vibrational eigenfrequencies
Creators
- 1. Department of Physics, Queen's University, Kingston, Ontario, K7L 3N6b (Canada)
Description
A compact nanopositioning stage is described that has high vibrational eigenfrequencies and is, therefore, insensitive to external vibrations. The high eigenfrequencies are produced by a rigid structure that is designed so that it does not degrade the motional performance of the stage. Preliminary performance evaluations are presented. We describe how a positioning stage of this type could be used as an integral part of a proximal probe
Additional details
Identifiers
- DOI
- 10.1063/1.2130939;
Publishing Information
- Journal Title
- Review of Scientific Instruments
- Journal Volume
- 76
- Journal Issue
- 11
- Journal Page Range
- p. 113702-113702.7
- ISSN
- 0034-6748
- CODEN
- RSINAK
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 37035750
- Subject category
- S71: CLASSICAL AND QUANTUM MECHANICS, GENERAL PHYSICS;
- Descriptors DEI
- EIGENFREQUENCY; EIGENFUNCTIONS; EIGENVALUES; PERFORMANCE; POSITIONING; PROBES; SCANNING TUNNELING MICROSCOPY
- Descriptors DEC
- FUNCTIONS; MICROSCOPY
Optional Information
- Notes
- (c) 2005 American Institute of Physics