Rear surface protection and front surface bi-layer passivation for silicon nanostructure-textured solar cells

Silicon nanostructure arrays were synthesized via Ag-catalysed chemical etching on solar cells. In contrast to the traditional etching in HF/AgNO3, the new technique used in this work produced nanostructure textures located only on the front surface of the cells. Furthermore, a SiO2/SiNX bi-layer was used to passivate the surface of the cells. By these optimizations, nanostructure-textured cells' performance was improved. The data obtained from this work are fundamental and has some reference value for future studies.