Preparation of copper and chlorine activated zinc sulfide by reactive cathode sputtering

Thin films of pure or mixed II-VI compounds can be obtained from the elements by reactive cathode sputtering. It is also possible to dope them directly during the synthesis by introducing the doping elements in the plasma, without further thermal treatment, and so to obtain luminescent thin films. This technique was used for preparing copper and chlorine activated zinc sulfide thin films. They exhibit non-usual luminescent spectra. Emission spectra show that various types of luminescent centers are simultaneously present, especially the well known green center, but also a yellow-orange center which is easily obtained by reactive cathodic sputtering. Varying the quantity of doping elements added to the plasma allows the change continuously the relative density of these centers and consequently the spectral repartition of the luminescence from green to orange