Published January 27, 2003 | Version v1
Journal article

Structure of direct-current microdischarge plasmas in helium

  • 1. Department of Aerospace Engineering and Engineering Mechanics, University of Texas at Austin, Austin, Texas 78712 (United States)

Description

A one-dimensional, self-consistent, continuum model is used to elucidate plasma phenomena in a parallel-plate dc microdischarge with a 250 μm gap at a pressure of 250 Torr. The microdischarge is found to have a bulk plasma region and a cathode sheath region with sizes that are comparable. Depending on the discharge current densities, peak electron densities of order up to 1014 cm-3 are predicted. Electron temperature of several eV are predicted within the cathode sheath while temperatures between 2 and 3 eV are observed in the bulk plasma. Gas temperatures of the order of 1000 K are predicted, emphasizing the importance of gas heating phenomena in dc microdischarges

Additional details

Identifiers

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
82
Journal Issue
4
Journal Page Range
p. 529-531
ISSN
0003-6951
CODEN
APPLAB

Optional Information

Notes
(c) 2003 American Institute of Physics.