Spatial distributions of plasma parameters in ICP reactor

The results of systematic experimental researches of ICP reactor are presented. Experimental results on spatial distribution of local plasma parameters (plasma density, temperature and electron energy distribution function) and radial profiles of ion current to processed surface are presented for atomic (Ar) and molecular (N2, CF4) gases. Relation between the plasma density profile and the ion current density radial distribution is discussed. Comparison of the obtained results with the calculations executed using 2D-fluid model has allowed to reveal the main rules of the ion flux profile formation.