Study of electronegative plasma sheath by using kinetic trajectory simulation (KTS) model

In recent years many researchers worked and studied electronegative plasma sheath with different simulation model but still, it is not fully understood, and a lot of work has been done continuously throughout the great effort. Due to this reason, I strongly motivated the different application of electronegative plasma used in daily life like etching, surface modification, medical treatment, etc. I study the characteristics of electronegative plasma sheath by using the kinetic trajectory simulation (KTS) model with the absence and presence of the oblique magnetic field and the effect of negative ion in electronegative plasma sheath being cold positive and negative ion and hot electron. The increment of the density of negative ion, the density of positive ion and electron decreases, the potential also decreases and clearly divide the magnetic pre-sheath and electrostatic Debye sheath edge. Our result agrees with previously published other models. Our Kinetic trajectory simulation model also provides a satisfactory result of the study of electronegative plasma sheath study. (author)