Published November 22, 2004
| Version v1
Journal article
Thermal stability of nc-TiN/a-BN/a-TiB2 nanocomposite coatings deposited by plasma chemical vapor deposition
Description
Thermal stability of nc-TiN/a-BN/a-TiB2 nanocomposites prepared by plasma chemical vapor deposition at a total pressure of several mbar and deposition temperature of 570 deg. C with TiCl4, BCl3, N2 and H2 as reactants was investigated. It was shown that the thermal stability of nc-TiN/a-BN/a-TiB2 nanocomposite coatings is fairly high but lower than that of the nc-TiN/a-Si3N4 and nc-TiN/a-Si3N4/a-TiSi2 coatings. The loss of boron from the coating together with the diffusion of chromium and other elements from the steel substrate into the coating during annealing are limiting the thermal stability of these coatings
Additional details
Identifiers
- DOI
- 10.1016/j.tsf.2004.03.046;
- PII
- S0040609004004006;
Publishing Information
- Journal Title
- Thin Solid Films
- Journal Volume
- 467
- Journal Issue
- 1-2
- Journal Page Range
- p. 133-139
- ISSN
- 0040-6090
- CODEN
- THSFAP
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 36081503
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; BORON CHLORIDES; BORON NITRIDES; CHEMICAL VAPOR DEPOSITION; COATINGS; NANOSTRUCTURES; SILICON NITRIDES; STABILITY; STEELS; TITANIUM BORIDES; TITANIUM CHLORIDES; TITANIUM NITRIDES
- Descriptors DEC
- ALLOYS; BORIDES; BORON COMPOUNDS; CARBON ADDITIONS; CHEMICAL COATING; CHLORIDES; CHLORINE COMPOUNDS; DEPOSITION; HALIDES; HALOGEN COMPOUNDS; HEAT TREATMENTS; IRON ALLOYS; IRON BASE ALLOYS; NITRIDES; NITROGEN COMPOUNDS; PNICTIDES; SILICON COMPOUNDS; SURFACE COATING; TITANIUM COMPOUNDS; TRANSITION ELEMENT ALLOYS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.