Published December 2006 | Version v1
Journal article Metadata-only

A novel method to determine electron density by optical emission spectroscopy in low-pressure nitrogen plasmas

Creators

  • 1. Department of Engineering Physics, Tsinghua University, Beijing 100084 (China)

Description

A novel method to determine volume averaged electron density by optical emission spectroscopy is investigated in inductively coupled nitrogen plasma. Using a kinetic model of low-pressure nitrogen discharge, volume averaged electron density can be obtained from experimentally measured vibrational distribution of the excited state C3Πu of the nitrogen molecule. Electron density versus rf power determined by this method and Langmuir probe measurement is compared and found to be in good agreement

Additional details

Identifiers

DOI
10.1063/1.2397583;

Publishing Information

Journal Title
Physics of Plasmas
Journal Volume
13
Journal Issue
12
Journal Page Range
p. 123501-123501.4
ISSN
1070-664X
CODEN
PHPAEN

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
38023425
Subject category
S70: PLASMA PHYSICS AND FUSION TECHNOLOGY;
Descriptors DEI
DISTRIBUTION; ELECTRON DENSITY; EMISSION SPECTROSCOPY; EXCITED STATES; HIGH-FREQUENCY DISCHARGES; LANGMUIR PROBE; MOLECULES; NITROGEN; PLASMA; PLASMA DENSITY
Descriptors DEC
ELECTRIC DISCHARGES; ELECTRIC PROBES; ELEMENTS; ENERGY LEVELS; NONMETALS; PROBES; SPECTROSCOPY

Optional Information

Notes
(c) 2006 American Institute of Physics