A 0.18-μm 3.3 V 16 k Bits 1R1T Phase Change Random Access Memory (PCRAM) Chip

Using standard 0.18-μm CMOS process and the special platform for 8-inch phase change random access memory (PCRAM), the first Chinese 16k bits PCRAM chip has been successfully achieved. A 1R1T structure has been designed for low voltage drop and low cost compared to the 1R1D structure and the BJT-switch structure. Full integration of the 16k bits PCRAM chip, including memory cell, array structure, critical circuit module, and physical layout, has been designed and verified. The critical integration technology of the phase change material (PCM) fabrication and the standard CMOS process has been solved. Test results about PCM in a large-scale array have been generated for the next research of PCRAM chip