Published November 2004 | Version v1
Journal article Metadata-only

Study of preferred orientation of zinc oxide films on the 64 deg. LiNbO3 substrates and their applications as liquid sensors

Creators

  • 1. Department of Electrical Engineering, Tung Nan Institute of Technology, Taipei, Taiwan (China)
  • 2. Department of Nursing, Shu-Zen College of medicine and management, Kaohsiung, Taiwan (China)
  • 3. Department of Electrical Engineering, National Cheng Kung University, Tainan, Taiwan (China)

Description

The preferred (002) orientation of zinc oxide (ZnO) films has been grown and demonstrated on 64 deg. LiNbO3 substrates using a rf magnetron sputtering system. The film orientations and crystallinity are strongly dependent on the rf power, total chamber pressure, ratio of argon to oxygen, and substrate temperature. We investigated the crystalline structure of the films by x-ray diffraction and scanning electron microscopy. Highly oriented (002) films were obtained under a total chamber pressure of 1.33 Pa, containing 40% oxygen and 60% argon, and a substrate temperature around 120 deg. C. Love-wave devices based on this structure (ZnO/IDTs/64 deg. LiNbO3) are presented

Additional details

Identifiers

DOI
10.1116/1.1809125;

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
22
Journal Issue
6
Journal Page Range
p. 2424-2430
ISSN
0734-2101
CODEN
JVTAD6

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
36080116
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Descriptors DEI
ARGON; CRYSTAL GROWTH; CRYSTAL STRUCTURE; GRAIN ORIENTATION; LITHIUM COMPOUNDS; MAGNETRONS; NIOBATES; OXYGEN; SCANNING ELECTRON MICROSCOPY; SPUTTERING; THIN FILMS; X-RAY DIFFRACTION; ZINC OXIDES
Descriptors DEC
ALKALI METAL COMPOUNDS; CHALCOGENIDES; COHERENT SCATTERING; DIFFRACTION; ELECTRON MICROSCOPY; ELECTRON TUBES; ELECTRONIC EQUIPMENT; ELEMENTS; EQUIPMENT; FILMS; FLUIDS; GASES; MICROSCOPY; MICROSTRUCTURE; MICROWAVE EQUIPMENT; MICROWAVE TUBES; NIOBIUM COMPOUNDS; NONMETALS; ORIENTATION; OXIDES; OXYGEN COMPOUNDS; RARE GASES; REFRACTORY METAL COMPOUNDS; SCATTERING; TRANSITION ELEMENT COMPOUNDS; ZINC COMPOUNDS

Optional Information

Notes
(c) 2004 American Vacuum Society