Published September 2, 1998
| Version v1
Journal article
Deposition of carbon thin films by free electron laser
Creators
- 1. Department of Electrical and Electronic Engineering, Toyohashi University of Technology, Tenpaku, Toyohashi 441-8580 (Japan)
- 2. Manufacturing Engineering Research Center, Toshiba Corporation, 33 Shin-isogo, Isogo, Yokohama 235-0017 (Japan)
Description
We used free electron laser (FEL) to ablate graphite and frozen acetone. FEL ablation of the graphite target produced fullerene (C60)-like films on silicon substrate at room temperature. Acetone in the frozen target was decomposed by FEL if the wavelength was tuned to its infrared absorption band, as revealed by a mass spectrometer. The deposit obtained on silicon from the frozen acetone target was transparent and shaped like glass piece or flat plate. (Copyright (c) 1998 Elsevier Science B.V., Amsterdam. All rights reserved.)
Additional details
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 144
- Journal Issue
- 1-4
- Journal Page Range
- p. 147-151
- ISSN
- 0168-583X
- CODEN
- NIMBEU
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Belarus
- INIS RN
- 31064250
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- ABLATION; ACETONE; CARBON; DEPOSITION; FREE ELECTRON LASERS; FULLERENES; GRAPHITE; INFRARED RADIATION; MASS SPECTROSCOPY; PHYSICAL RADIATION EFFECTS; THIN FILMS
- Descriptors DEC
- CARBON; ELECTROMAGNETIC RADIATION; ELEMENTS; FILMS; KETONES; LASERS; MINERALS; NONMETALS; ORGANIC COMPOUNDS; RADIATION EFFECTS; RADIATIONS; SPECTROSCOPY