Optimization of Sputtering Condition of IrOx Thin Film Stimulation Electrode for Retinal Prosthesis Application

We have optimized the sputtering condition of the RF sputtering deposition for the fabrication of the iridium oxide thin film used in retinal prosthesis applications. The deposited IrOx thin films were characterized by using the cyclic voltammetry method and the charge delivery capacity was calculated from the integral of the generic CV curve. From the experimental results, the charge delivery capacity of IrOx under the best sputtering condition was improved to more than 50 times that of Pt. We also verified from our in vivo experiment results that IrOx has a better charge delivery capacity than that of Pt. The in vitro and in vivo experimental results also show that IrOx is a promising candidate for retinal prosthesis applications.