Published September 1978 | Version v1
Report Metadata-only

Ion implantation (a bibliography with abstracts). Report for 1964--August 1978

Creators

Description

The cited reports discuss research concerning ion implantation, particularly as applied to the microelectronics field. Specific topics include equipment, techniques, semiconductor doping, and radiation effects on material properties

Availability note (English)

MF available from INIS under the Report Number; Available from NTIS.

Additional details

Publishing Information

Imprint Pagination
299 p.
Report number
NTIS/PS--78/1031

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
10472774
Subject category
S36: MATERIALS SCIENCE;
Descriptors DEI
DOPED MATERIALS; GALLIUM ARSENIDES; ION IMPLANTATION; MICROELECTRONICS; PHYSICAL RADIATION EFFECTS; SEMICONDUCTOR DEVICES; SEMICONDUCTOR JUNCTIONS; SEMICONDUCTOR MATERIALS; SILICON OXIDES
Descriptors DEC
ARSENIC COMPOUNDS; ARSENIDES; CHALCOGENIDES; GALLIUM COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; RADIATION EFFECTS; SILICON COMPOUNDS