Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity
Creators
- 1. Transducers Science and Technology Group, MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE Enschede (Netherlands)
Description
Biologically inspired sensor-designs are investigated as a possible path to surpass the performance of more traditionally engineered designs. Inspired by crickets, artificial hair sensors have shown the ability to detect minute flow signals. This paper addresses developments in the design, fabrication, interfacing and characterization of biomimetic hair flow-sensors towards sensitive high-density arrays. Improvement of the electrode design of the hair sensors has resulted in a reduction of the smallest hair movements that can be measured. In comparison to the arrayed hairs-sensor design, the detection-limit was arguably improved at least twelve-fold, down to 1 mm s–1 airflow amplitude at 250 Hz as measured in a bandwidth of 3 kHz. The directivity pattern closely resembles a figure-of-eight. These sensitive hair-sensors open possibilities for high-resolution spatio-temporal flow pattern observations. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/0960-1317/23/3/035010Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Micromechanics and Microengineering. Structures, Devices and Systems
- Journal Volume
- 23
- Journal Issue
- 3
- Journal Page Range
- [16 p.]
- ISSN
- 0960-1317
- CODEN
- JMMIEZ
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 47053938
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Descriptors DEI
- AMPLITUDES; COMPARATIVE EVALUATIONS; DENSITY; DESIGN; ELECTRODES; FABRICATION; HAIR; KHZ RANGE 01-100; RESOLUTION; SENSITIVITY; SENSORS; SIGNALS
- Descriptors DEC
- BODY; EVALUATION; FREQUENCY RANGE; KHZ RANGE; ORGANS; PHYSICAL PROPERTIES; SKIN