Published March 2013 | Version v1
Journal article

Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

  • 1. Transducers Science and Technology Group, MESA<sup>+</sup> Research Institute, University of Twente, PO Box 217, 7500 AE Enschede (Netherlands)

Description

Biologically inspired sensor-designs are investigated as a possible path to surpass the performance of more traditionally engineered designs. Inspired by crickets, artificial hair sensors have shown the ability to detect minute flow signals. This paper addresses developments in the design, fabrication, interfacing and characterization of biomimetic hair flow-sensors towards sensitive high-density arrays. Improvement of the electrode design of the hair sensors has resulted in a reduction of the smallest hair movements that can be measured. In comparison to the arrayed hairs-sensor design, the detection-limit was arguably improved at least twelve-fold, down to 1 mm s–1 airflow amplitude at 250 Hz as measured in a bandwidth of 3 kHz. The directivity pattern closely resembles a figure-of-eight. These sensitive hair-sensors open possibilities for high-resolution spatio-temporal flow pattern observations. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/0960-1317/23/3/035010

Additional details

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering. Structures, Devices and Systems
Journal Volume
23
Journal Issue
3
Journal Page Range
[16 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
47053938
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
AMPLITUDES; COMPARATIVE EVALUATIONS; DENSITY; DESIGN; ELECTRODES; FABRICATION; HAIR; KHZ RANGE 01-100; RESOLUTION; SENSITIVITY; SENSORS; SIGNALS
Descriptors DEC
BODY; EVALUATION; FREQUENCY RANGE; KHZ RANGE; ORGANS; PHYSICAL PROPERTIES; SKIN