Published May 1974 | Version v1
Journal article

Secondary electron yield with primary electron beam of kilo-electron-volts

Creators

  • 1. Department of applied Physics, Osaka University, Suita, Osaka, Japan

Description

Secondary electron yields δPE due to primary electrons of kilo-electron-volts are estimated for various metals by measuring total electron yields δT in an UHV system and using a Monte Carlo calculation to derive δPE from δT. The dependences of δT/δPE as well as δPE on both the atomic number Z and primary energy are also discussed from a theoretical viewpoint based on the Monte Carlo technique for primary energies higher than a few keV and on a simple theory for lower primary energies.

Additional details

Additional titles

Augmented title (English)
Scanning electron microscope, image of surface topography

Identifiers

Publishing Information

Journal Title
Journal of Applied Physics
Journal Volume
45
Journal Issue
5
Series
J. Appl. Phys.
Journal Page Range
2107-2111
ISSN
0021-8979

Optional Information

Notes
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