Published March 1974 | Version v1
Journal article Metadata-only

Ta thin film resistors reactively sputtered onto substrates mounted on a rotating carousel

Creators

  • 1. McMaster Univ., Hamilton, Ontario (Canada)

Description

no abstract available

Additional details

Identifiers

DOI
10.1007/bf00737845;

Publishing Information

Journal Title
Journal of Materials Science
Journal Volume
9
Journal Issue
3
Series
J. Mater. Sci.
Journal Page Range
438-446
ISSN
0022-2461

INIS

Country of Publication
United Kingdom
Country of Input or Organization
United Kingdom
INIS RN
5131298
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Descriptors DEI
ANGULAR DISTRIBUTION; ELECTRIC CONDUCTIVITY; ELECTRIC DISCHARGES; FILMS; HEAT TREATMENTS; HIGH VACUUM; NITROGEN; OXYGEN; RESISTORS; ROTATION; SPUTTERING; SUPPORTS; TANTALUM; TEMPERATURE COEFFICIENT
Descriptors DEC
DISTRIBUTION; ELECTRICAL EQUIPMENT; ELECTRICAL PROPERTIES; ELEMENTS; MECHANICAL STRUCTURES; METALS; NONMETALS; PHYSICAL PROPERTIES; REACTIVITY COEFFICIENTS; TRANSITION ELEMENTS

Optional Information

Notes
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