Published June 1991 | Version v1
Journal article Metadata-only

Effects of secondary interactions on thin film thickness meaurements using XRF

Creators

  • 1. Inst. of High Energy Physics, Beijing (China)

Description

The effects of secondary interactions induced by the substrate or a second film on thin film thickness measurements by X-ray fluorescence are described for both single-layer-film-substrate and double-layer-film-substrate systems. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research, Section B
Journal Volume
58
Journal Issue
2
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
287-290
ISSN
0168-583X
CODEN
NIMBE

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
23004042
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
FLUORESCENCE; INTERACTIONS; LAYERS; NICKEL; SUBSTRATES; THICKNESS; THIN FILMS; TIN; X-RAY FLUORESCENCE ANALYSIS
Descriptors DEC
CHEMICAL ANALYSIS; DIMENSIONS; ELEMENTS; EMISSION; FILMS; LUMINESCENCE; METALS; NONDESTRUCTIVE ANALYSIS; PHOTON EMISSION; TRANSITION ELEMENTS; X-RAY EMISSION ANALYSIS

Optional Information

Notes
Letter-to-the-editor.