Published May 1988 | Version v1
Journal article Metadata-only

Preparation of TiN thin film by dynamic mixing method

Creators

  • 1. Kogakuin Univ., Tokyo (Japan)

Description

Published in summary form only

Additional details

Additional titles

Subtitle (English)
N_2"+ (1 keV) irradiation effects

Publishing Information

Journal Title
Shinku
Journal Volume
31
Journal Issue
5
Series
Shinku.
Journal Page Range
529-532
ISSN
0559-8516
CODEN
SHINA

Conference

Title
28. vacuum symposium.
Dates
11-13 Nov 1987.
Place
Tokyo (Japan).

INIS

Country of Publication
Japan
Country of Input or Organization
Japan
INIS RN
20003407
Subject category
S07: ISOTOPES AND RADIATION SOURCES;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
DEGASSING; HARDNESS; HIGH TEMPERATURE; IRRADIATION; KEV RANGE 01-10; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; TEMPERATURE DEPENDENCE; THIN FILMS; TITANIUM NITRIDES; VAPOR DEPOSITED COATINGS
Descriptors DEC
CHARGED PARTICLES; COATINGS; ENERGY RANGE; FILMS; IONS; KEV RANGE; MECHANICAL PROPERTIES; NITRIDES; NITROGEN COMPOUNDS; RADIATION EFFECTS; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS