Evaluation of electron emission properties of field emitter arrays irradiated by proton and helium ion beam

Endurance of field emitter arrays against ion irradiation was evaluated. Field emitter arrays with hafnium nitride cathode were fabricated, and the devices were irradiated by a proton and a helium ion beam with the energy of some MeV. The electron emission properties of the device were investigated in a vacuum vessel. No significant deterioration of the electron emission properties were found. In order to check the deterioration of insulating layer, a sandwich structure of emitter, insulating layer, and the gate layer was fabricated and it was also irradiated by the ion beams similarly to the field emitter arrays. The insulating property did not vary so much. (author)