Published March 1992 | Version v1
Journal article Metadata-only

Analytical methods for investigation of ion-implanted polymer layers

Creators

  • 1. Minsk Research Inst. of Radiomaterials (Belarus)
  • 2. Research Inst. of Applied Physics, Minsk (Belarus)

Description

The present paper deals with the results of a structure and composition study of some ion-implanted polymers: polyimide (PI), poly-p-chlorostyrene, polymethacriloylchloride as well as some organic photoresists. The structures under investigation were irradiated with B+, Ar+ and Sb+ ions at a dose range of 1013 to 1017 ions/cm2 and energies of 40 to 150 keV. The parameters of spatial distribution, elastic and inelastic energy losses were evaluated by Monte Carlo simulation with allowance for recoil atom motion. The principal pattern of structure and composition changes occurring in the above-given polymers were studied by IR spectroscopy and RBS measurements. (orig.)

Additional details

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B
Journal Volume
65
Journal Issue
1-4
Series
Nucl. Instrum. Methods Phys. Res., Sect. B.
Journal Page Range
438-441
ISSN
0168-583X
CODEN
NIMBE

Conference

Title
6. conference on radiation effects in insulators.
Dates
24-28 Jun 1991.
Place
Weimar (Germany).

INIS

Country of Publication
Netherlands
Country of Input or Organization
Netherlands
INIS RN
23070868
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ANNEALING; ANTIMONY IONS; ARGON IONS; BACKSCATTERING; BORON IONS; CHEMICAL COMPOSITION; ELASTIC SCATTERING; ENERGY LOSSES; INELASTIC SCATTERING; INFRARED SPECTRA; ION IMPLANTATION; KEV RANGE 10-100; KEV RANGE 100-1000; LAYERS; MONTE CARLO METHOD; ORGANIC CHLORINE COMPOUNDS; PMMA; POLYMERS; POLYSTYRENE; RADIATION DOSES; RECOILS; RUTHERFORD SCATTERING
Descriptors DEC
CALCULATION METHODS; CHARGED PARTICLES; ENERGY RANGE; ESTERS; HEAT TREATMENTS; IONS; KEV RANGE; ORGANIC COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; POLYACRYLATES; POLYOLEFINS; POLYVINYLS; SCATTERING; SPECTRA