Published August 1, 2018 | Version v1
Journal article

The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures

  • 1. School of Software and Microelectronics, Northwestern Polytechnical University, Xi'an 710072 (China)
  • 2. School of Chinese Meteria Medica, Guangzhou University of Chinese Medicine, Guangzhou 510006 (China)
  • 3. Department of Mechanical Engineering, York University, Toronto (Canada)

Description

High aspect ratio units are necessary parts of complex microstructures in microfluidic devices. Some methods that are available to achieve a high aspect ratio require expensive materials or complex chemical processes; for other methods it is difficult to reach simple high aspect ratio structures, which need supporting structures. The paper presents a simple and cheap two-step Polydimethylsioxane (PDMS) transferring process to get high aspect ratio single pillars, which only requires covering the PDMS mold with a Brij@52 surface solution after getting a relative PDMS mold based on an SU8 mold. The experimental results demonstrate the method efficiency and effectiveness. (paper)

Availability note (English)

Available from http://dx.doi.org/10.1088/1674-4926/39/8/086001

Additional details

Publishing Information

Journal Title
Journal of Semiconductors
Journal Volume
39
Journal Issue
8
Journal Page Range
[4 p.]
ISSN
1674-4926

INIS

Country of Publication
China
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
51067313
Subject category
S77: NANOSCIENCE AND NANOTECHNOLOGY;
Descriptors DEI
ASPECT RATIO; EFFICIENCY; MICROSTRUCTURE; SOLUTIONS; SURFACES
Descriptors DEC
DIMENSIONLESS NUMBERS; DISPERSIONS; HOMOGENEOUS MIXTURES; MIXTURES