Published August 1, 2018
| Version v1
Journal article
The simple two-step polydimethylsiloxane transferring process for high aspect ratio microstructures
Creators
- 1. School of Software and Microelectronics, Northwestern Polytechnical University, Xi'an 710072 (China)
- 2. School of Chinese Meteria Medica, Guangzhou University of Chinese Medicine, Guangzhou 510006 (China)
- 3. Department of Mechanical Engineering, York University, Toronto (Canada)
Description
High aspect ratio units are necessary parts of complex microstructures in microfluidic devices. Some methods that are available to achieve a high aspect ratio require expensive materials or complex chemical processes; for other methods it is difficult to reach simple high aspect ratio structures, which need supporting structures. The paper presents a simple and cheap two-step Polydimethylsioxane (PDMS) transferring process to get high aspect ratio single pillars, which only requires covering the PDMS mold with a Brij@52 surface solution after getting a relative PDMS mold based on an SU8 mold. The experimental results demonstrate the method efficiency and effectiveness. (paper)
Availability note (English)
Available from http://dx.doi.org/10.1088/1674-4926/39/8/086001Additional details
Identifiers
Publishing Information
- Journal Title
- Journal of Semiconductors
- Journal Volume
- 39
- Journal Issue
- 8
- Journal Page Range
- [4 p.]
- ISSN
- 1674-4926
INIS
- Country of Publication
- China
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 51067313
- Subject category
- S77: NANOSCIENCE AND NANOTECHNOLOGY;
- Descriptors DEI
- ASPECT RATIO; EFFICIENCY; MICROSTRUCTURE; SOLUTIONS; SURFACES
- Descriptors DEC
- DIMENSIONLESS NUMBERS; DISPERSIONS; HOMOGENEOUS MIXTURES; MIXTURES