SIMS investigations of iron profiles in LiNbO3:Ti waveguides
Creators
- 1. Osnabrueck Univ. (Germany, F.R.). Fachbereich Physik
Description
The depth profiles of iron impurity in LiNbO3:Ti waveguides fabricated by diffusion of titanium into LiNbO3 crystals have been investigated by SIMS measurements. The determination of iron concentration both at the non-diffused back of the waveguide and at the titanium-diffused side and a mass spectrum of the titanium layer evaporated on LiNbO3 substrate show that the iron concentration is enhanced in surface regions of titanium-diffused LiNbO3 waveguides caused by iron contamination of the titanium. The measured enhancement of 27% is in excellent agreement with holographic results. SIMS investigations offer a suitable method to detect iron impurities in the Ti layer itself as well as in the diffused regions of LiNbO3:Ti optical waveguides in the ppm range
Additional details
Publishing Information
- Journal Title
- Phys. Status Solidi A
- Journal Volume
- 105
- Journal Issue
- 1
- Series
- Phys. Status Solidi A.
- Journal Page Range
- K17-K20
- ISSN
- 0031-8965
- CODEN
- PSSAB
INIS
- Country of Publication
- Germany
- Country of Input or Organization
- German Democratic Republic
- INIS RN
- 19066761
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; CATIONS; DEPTH; DIFFUSION; DOPED MATERIALS; HOLOGRAPHY; IMPURITIES; ION PROBES; IRON COMPOUNDS; LAYERS; LITHIUM COMPOUNDS; MASS SPECTROSCOPY; NIOBATES; REFRACTIVE INDEX; SPATIAL DISTRIBUTION; TITANIUM; TRACE AMOUNTS; VALENCE; WAVEGUIDES
- Descriptors DEC
- ALKALI METAL COMPOUNDS; CHARGED PARTICLES; DIMENSIONS; DISTRIBUTION; ELEMENTS; HEAT TREATMENTS; IONS; MATERIALS; METALS; NIOBIUM COMPOUNDS; OPTICAL PROPERTIES; OXYGEN COMPOUNDS; PHYSICAL PROPERTIES; PROBES; SPECTROSCOPY; TRANSITION ELEMENT COMPOUNDS; TRANSITION ELEMENTS
Optional Information
- Notes
- Short note.