Published May 2008 | Version v1
Journal article Metadata-only

Hydrophobic coatings for MEMS applications

Creators

  • 1. Department of Microsystems Technology, Hamburg-Harburg University of Technology, Eissendorfer Str.42, 21073 Hamburg (Germany)

Description

Different kinds of thin-film coatings were investigated with regard to their applicability as hydrophobic coatings for MEMS. The films were deposited onto silicon and borosilicate glass substrates by spincoating of Dyneon(TM) PTFE and PFA, plasmapolymerization of HMDS-N and C4F8 as well as liquid-phase and vapor-phase coating of SAMs from DDMS, FDTS, FOTS and Geleste Aquaphobe(TM) CM. The layer properties were analyzed using profilometry, FTIR, SEM and contact angle measurements. Furthermore, the adhesion of the layers to the substrates was determined in an acetone ultrasonic bath. The influence of various deposition process parameters on the properties of the films was investigated. As these layers can be used in microfluidic systems, as water-repellent layers and as anti-stiction coatings, they are suited for versatile fields of application

Availability note (English)

Available from http://dx.doi.org/10.1088/0960-1317/18/5/055030

Additional details

Identifiers

DOI
10.1088/0960-1317/18/5/055030;
PII
S0960-1317(08)60187-4;

Publishing Information

Journal Title
Journal of Micromechanics and Microengineering. Structures, Devices and Systems
Journal Volume
18
Journal Issue
5
Journal Page Range
[12 p.]
ISSN
0960-1317
CODEN
JMMIEZ

INIS

Country of Publication
United Kingdom
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
44099515
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ACETONE; BOROSILICATE GLASS; COATINGS; DEPOSITION; DEPOSITS; ELECTROMECHANICS; FOURIER TRANSFORMATION; INFRARED SPECTRA; LAYERS; LIQUIDS; MICROSTRUCTURE; SCANNING ELECTRON MICROSCOPY; SILICON; SUBSTRATES; TEFLON; THIN FILMS; VAPORS
Descriptors DEC
ELECTRON MICROSCOPY; ELEMENTS; FILMS; FLUIDS; FLUORINATED ALIPHATIC HYDROCARBONS; GASES; GLASS; HALOGENATED ALIPHATIC HYDROCARBONS; INTEGRAL TRANSFORMATIONS; KETONES; MATERIALS; MECHANICS; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC FLUORINE COMPOUNDS; ORGANIC HALOGEN COMPOUNDS; ORGANIC POLYMERS; PETROCHEMICALS; PETROLEUM PRODUCTS; PLASTICS; POLYETHYLENES; POLYMERS; POLYOLEFINS; POLYTETRAFLUOROETHYLENE; SEMIMETALS; SPECTRA; SYNTHETIC MATERIALS; TRANSFORMATIONS