Published 1988 | Version v1
Miscellaneous

Characterization of ion beam mixing induced defects in Si

  • 1. Port Elizabeth Univ. (South Africa). Dept. of Physics

Description

Abstract only

Additional details

Publishing Information

Imprint Title
33rd Annual conference and the 23rd annual theoretical seminar of the South African Institute of Physics
Imprint Pagination
78 p.
Journal Page Range
p. 68.
Report number
INIS-mf--11319

Conference

Title
33. Annual conference of the South African Institute of Physics.
Dates
4-8 Jul 1988.
Place
Grahamstown (South Africa).

INIS

Country of Publication
South Africa
Country of Input or Organization
South Africa
INIS RN
19094210
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
CRYSTAL DEFECTS; CRYSTAL LATTICES; ION BEAMS; ION IMPLANTATION; KEV RANGE 10-100; SCHOTTKY BARRIER DIODES; SILICON; SPECTROSCOPY
Descriptors DEC
BEAMS; CRYSTAL STRUCTURE; ELEMENTS; ENERGY RANGE; KEV RANGE; SEMICONDUCTOR DEVICES; SEMICONDUCTOR DIODES; SEMIMETALS