Published June 2002 | Version v1
Journal article

Fluid dynamics calculation of sputtering

Description

The sputtering yields from hot, cylindrical spikes are calculated. To this end, the evolution with time of the energy deposited in a Lennard-Jones target is assumed to be described by the fluid dynamics equations. Furthermore, a crystal pressure is introduced that provides the forces which keep the target around normal density at low temperature. The results of these calculations show that, contrary to predictions of the standard thermal spike theory, the sputtering yield increases with excitation energy in a less-than-quadratic manner. The origin of such a discrepancy relates to the elastic wave resulting from the high-pressure built up in the hot spike. This wave appears to be more efficient than thermal conduction in carrying energy away from the hot core of the spike. The sensitivity of the sputtering yield upon viscosity, the speed of sound and other thermodynamics properties of the target are investigated

Additional details

Identifiers

PII
S0168583X02008947;

Publishing Information

Journal Title
Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
Journal Volume
193
Journal Issue
1-4
Journal Page Range
p. 727-733
ISSN
0168-583X
CODEN
NIMBEU

INIS

Country of Publication
Netherlands
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
34004750
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Descriptors DEI
ENERGY ABSORPTION; LENNARD-JONES POTENTIAL; MOLECULAR DYNAMICS METHOD; SPUTTERING; THERMAL SPIKES; VISCOSITY
Descriptors DEC
ABSORPTION; CALCULATION METHODS; POTENTIALS; SORPTION

Optional Information

Copyright
Copyright (c) 2002 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.