Dependence of secondary electron emission from copper on the incident angle of keV electrons

A Monte Carlo simulation of secondary electron emission from copper bombarded with low energy electrons was carried out for analyzing its dependence on the angle of incidence. For the simulation, elastic scattering cross section of 10eV-4keV electron with copper atom is investigated using partial wave expansion technique. Further, the Kanaya equation is used for energy loss calculation of incident electron, and an exponential decay of secondary electrons in copper is assumed. The calculated secondary electron emission yield does not increase so large as 1/cos φ (φ: the angle of incidence) with oblique incidence. The variation of the yield with φ agrees with experimental result obtained by Koshikawa and Shimizu. (author)