Published February 22, 2010
| Version v1
Journal article
Hydrogen in InN: A ubiquitous phenomenon in molecular beam epitaxy grown material
Creators
- 1. Department of Physics, Chemistry and Biology, Linkoeping University, SE-581 83 Linkoeping (Sweden)
- 2. Instituto Tecnologico e Nuclear, 2686-953 Sacavem (Portugal)
- 3. Department of Electrical Engineering, University of Nebraska, Lincoln, Nebraska 68588 (United States)
- 4. Center for Condensed Matter Sciences, National Taiwan University, Taipei 106, Taiwan (China)
- 5. Department of Electrical and Computer Engineering, Cornell University, Ithaca, New York 14853 (United States)
- 6. Department of Physics and Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan (China)
- 7. Department of Photonics, Ritsumeikan University, Shiga 525-8577 (Japan)
Description
We study the unintentional H impurities in relation to the free electron properties of state-of-the-art InN films grown by molecular beam epitaxy (MBE). Enhanced concentrations of H are revealed in the near surface regions of the films, indicating postgrowth surface contamination by H. The near surface hydrogen could not be removed upon thermal annealing and may have significant implications for the surface and bulk free electron properties of InN. The bulk free electron concentrations were found to scale with the bulk H concentrations while no distinct correlation with dislocation density could be inferred, indicating a major role of hydrogen for the unintentional conductivity in MBE InN.
Additional details
Identifiers
- DOI
- 10.1063/1.3327333;
Publishing Information
- Journal Title
- Applied Physics Letters
- Journal Volume
- 96
- Journal Issue
- 8
- Journal Page Range
- p. 081907-081907.3
- ISSN
- 0003-6951
- CODEN
- APPLAB
INIS
- Country of Publication
- United States
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 41078495
- Subject category
- S36: MATERIALS SCIENCE;
- Descriptors DEI
- ANNEALING; CRYSTAL GROWTH; DISLOCATIONS; ELECTRONS; HYDROGEN; IMPURITIES; INDIUM NITRIDES; MOLECULAR BEAM EPITAXY; SEMICONDUCTOR MATERIALS; SURFACE CONTAMINATION; THIN FILMS
- Descriptors DEC
- CONTAMINATION; CRYSTAL DEFECTS; CRYSTAL GROWTH METHODS; CRYSTAL STRUCTURE; ELEMENTARY PARTICLES; ELEMENTS; EPITAXY; FERMIONS; FILMS; HEAT TREATMENTS; INDIUM COMPOUNDS; LEPTONS; LINE DEFECTS; MATERIALS; NITRIDES; NITROGEN COMPOUNDS; NONMETALS; PNICTIDES
Optional Information
- Notes
- (c) 2010 American Institute of Physics