Published June 2004
| Version v1
Journal article
Stopping power of thin GaAs films for Si and P ions
Description
Stopping powers of energetic Si and P ions are measured in thin GaAs films. A new technique derived from molecular beam epitaxy (MBE) was developed to prepare near stoichiometric GaAs films on thin carbon layers for use in transmission ion beam experiments. The GaAs films were characterized using X-ray photoelectron spectroscopy (XPS) and particle induced X-ray emission (PIXE). Stopping power data are presented for the first time for Si and P in GaAs
Additional details
Identifiers
- DOI
- 10.1016/j.nimb.2004.01.067;
- PII
- S0168583X04000953;
Publishing Information
- Journal Title
- Nuclear Instruments and Methods in Physics Research. Section B, Beam Interactions with Materials and Atoms
- Journal Volume
- 219-220
- Journal Issue
- 4
- Journal Page Range
- p. 273-277
- ISSN
- 0168-583X
- CODEN
- NIMBEU
Conference
- Title
- 16. international conference on ion beam analysis
- Dates
- 29 Jun - 4 Jul 2003
- Place
- Albuquerque, NM (United States)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- Singapore
- INIS RN
- 35105650
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- GALLIUM ARSENIDES; ION BEAMS; ION IMPLANTATION; IONS; MOLECULAR BEAM EPITAXY; PHOSPHORUS; RADIOTHERAPY; SILICON; STOICHIOMETRY; STOPPING POWER; THIN FILMS; X-RAY EMISSION ANALYSIS; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIDES; BEAMS; CHARGED PARTICLES; CHEMICAL ANALYSIS; CRYSTAL GROWTH METHODS; ELECTRON SPECTROSCOPY; ELEMENTS; EPITAXY; FILMS; GALLIUM COMPOUNDS; MEDICINE; NONDESTRUCTIVE ANALYSIS; NONMETALS; NUCLEAR MEDICINE; PHOTOELECTRON SPECTROSCOPY; PNICTIDES; RADIOLOGY; SEMIMETALS; SPECTROSCOPY; THERAPY
Optional Information
- Copyright
- Copyright (c) 2004 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.