Published May 2003 | Version v1
Journal article Metadata-only

Effects of ultraviolet/ozone treatment on benzocyclobutene films

Creators

  • 1. LAAS-CNRS, 7 avenue du colonel Roche, 31077 Toulouse Cedex 4 (France)

Description

Benzocyclobutene (BCB) is a dielectric polymer resin used in microelectronics for its physical properties and its chemical resistance. UV/ozone photochemical treatment modifies the chemical properties of BCB: It creates a near SiO2 composition oxidized surface layer and degrades the polymer structure of BCB. The oxidized surface layer can be etched with fluoride acid and the degraded layer underneath is soluble with acetone. These BCB chemical modifications may be useful for BCB reworking after polymerization. UV/ozone treatment also has an effect on surface characteristics improving the surface tension and decreasing surface roughness of BCB

Additional details

Identifiers

DOI
10.1116/1.1570836;

Publishing Information

Journal Title
Journal of Vacuum Science and Technology. A, Vacuum, Surfaces and Films
Journal Volume
21
Journal Issue
3
Journal Page Range
p. 766-771
ISSN
0734-2101
CODEN
JVTAD6

INIS

Country of Publication
United States
Country of Input or Organization
International Atomic Energy Agency (IAEA)
INIS RN
35032280
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S36: MATERIALS SCIENCE;
Descriptors DEI
BUTENES; CHEMICAL PROPERTIES; ETCHING; MICROELECTRONICS; PHOTOCHEMICAL REACTIONS; POLYMERIZATION; POLYMERS; ROUGHNESS; SILICON OXIDES; SURFACE TENSION; SURFACE TREATMENTS
Descriptors DEC
ALKENES; CHALCOGENIDES; CHEMICAL REACTIONS; HYDROCARBONS; ORGANIC COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; SILICON COMPOUNDS; SURFACE FINISHING; SURFACE PROPERTIES

Optional Information

Notes
(c) 2003 American Vacuum Society.