Published February 28, 2005
| Version v1
Patent
Process for obtaining porous semiconductor structures
Description
The invention relates to semiconductor production technology, in particular to the obtaining of porous semiconductor structures. The process for obtaining porous semiconductor structures consists in that onto the semiconductor surface there is applied a mask, onto the uncovered regions there are implanted high-energy ions, then the mask is removed and the semiconductor surface is subjected to the electrochemical pickling. Novelty consists in that before pickling onto the semiconductor surface there is applied a layer of photoresist material.
Availability note (English)
Available at http://www.db.agepi.md/inventions/Details.aspx?id=a%202004%200250&linkPdf=/brevet/Acordare/a%202004%200250.pdfAdditional details
Additional titles
- Original title (Romanian)
- Procedeu de obtinere a structurilor semiconductoare poroase
Identifiers
Publishing Information
- Imprint Pagination
- 4 p.
- IPC:
- Int. Cl. H 01 L 21/3063; 21/265; B 82 B 3/00
- IPC
- Int. Cl. H 01 L 21/3063; 21/265; B 82 B 3/00
- Patent number
- MD patent document 2714/F1/
INIS
- Country of Publication
- Moldova, Republic of
- Country of Input or Organization
- Moldova, Republic of
- INIS RN
- 45084538
- Subject category
- S36: MATERIALS SCIENCE; S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Non-conventional Literature
- Descriptors DEI
- ANODIZATION; INDIUM PHOSPHIDES; IONS; PICKLING; POROUS MATERIALS; SCANNING ELECTRON MICROSCOPY; SEMICONDUCTOR MATERIALS
- Descriptors DEC
- CHARGED PARTICLES; CHEMICAL COATING; CORROSION PROTECTION; DEPOSITION; ELECTROCHEMICAL COATING; ELECTROLYSIS; ELECTRON MICROSCOPY; INDIUM COMPOUNDS; LYSIS; MATERIALS; MICROSCOPY; PHOSPHIDES; PHOSPHORUS COMPOUNDS; PNICTIDES; SURFACE COATING; SURFACE TREATMENTS
Optional Information
- Notes
- 2 refs., 2 figs.
- Secondary number(s)
- MD patent application a/2004/0250