Design and fabrication of a chamber for the deposit of thin films by laser ablation

The laser ablation technique is an alternative for the obtention of thin films which is less expensive, more reliable, efficient and with some advantages with respect to conventional processes. On of the most important components which forms a laser ablation system is the vacuum chamber, that has as general purposes the following: a) To carry out studies about plasma such as optical emission spectroscopy and measurements by deflectometry. b) To carry out an In situ monitoring about the film growth through the reflectivity measurements of the combination substrate-film. c) To deposit thin films of different materials such as oxides, carbon, metals, etc. In this work it is showed how the vacuum chamber was designed and made to perform the store of thin films by laser ablation and for characterising the formed plasma as a result of the ablation process. The chamber design was enough versatile that will allow to add it more accessory just making it simple modifications. Its cost was very cheap more or less one twentieth of a commercial chamber. (Author)