Published April 2009 | Version v1
Journal article

Chemical etching of InSb polar planes during preparation for liquid-phase epitaxy

Description

The results of chemical etching in different etchants of polar A and B faces of inSb substrates, prepared for LPE, were presented. It was shown, that the etchant on basis of tartaric acid mirror polishes the B face without any traces of oxides. In result of etching in the solution on basis of lactic acid on the A face there forming the set of planes slopped to the initial surface under the angle, closely related to the misorientation angle from crystallographic plane

Additional details

Additional titles

Original title (Russian)
Химическое травление полярных плоскостеы (111) InSb при подготовке к йидкостноы епитаксии

Publishing Information

Journal Title
Fizika (Baku)
Journal Volume
15
Journal Issue
2
Journal Page Range
p. 96-99
ISSN
1028-8546