Published 1996
| Version v1
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The influence of microscopic and macroscopic non-stoichiometry on interfacial planarity during the solid-phase epitaxial growth of amorphized GaAs
Creators
- 1. Australian National Univ., Canberra, ACT (Australia). Dept. of Physics
Description
The influence of microscopic and macroscopic non-stoichiometry on the Solid-Phase Epitaxial Growth of GaAs has been studied. Ion implantation has been employed to produce microscopic non-stoichiometry via Ga and As implants and macroscopic non-stoichiometry via Ga or As implants. In-situ Time Resolved Reflectivity and Transmission Electron Microscopy and ex-situ Rutherford Backscattering Spectroscopy and Channeling have been used to investigate the regrowth of amorphized GaAs layers. As non-stoichiometry shifts from microscopic to macroscopic the interface loses its planar nature and subsequently gets rougher. 7 refs., 3 figs
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Additional details
Publishing Information
- Imprint Place
- Lucas Heights (Australia)
- Imprint Title
- 9th Australian conference on nuclear techniques of analysis. Proceedings
- Imprint Pagination
- 186 p.
- Journal Page Range
- p. 44-46.
- Report number
- INIS-AU--0003
Conference
- Title
- 9. Australian conference on nuclear techniques of analysis.
- Dates
- 27-29 Nov 1995.
- Place
- Newcastle, NSW (Australia).
INIS
- Country of Publication
- Australia
- Country of Input or Organization
- Australia
- INIS RN
- 28056677
- Subject category
- S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE; S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference, Numerical Data
- Descriptors DEI
- AMORPHOUS STATE; ARSENIC 75; CRYSTAL GROWTH; EPITAXY; EXPERIMENTAL DATA; GALLIUM ARSENIDES; GALLIUM 69; INTERFACES; ION IMPLANTATION; ORDER-DISORDER TRANSFORMATIONS; PHYSICAL RADIATION EFFECTS; REFLECTIVITY; STRUCTURAL CHEMICAL ANALYSIS; TIME DEPENDENCE
- Descriptors DEC
- ARSENIC COMPOUNDS; ARSENIC ISOTOPES; ARSENIDES; CRYSTAL GROWTH METHODS; DATA; GALLIUM COMPOUNDS; GALLIUM ISOTOPES; INFORMATION; INTERMEDIATE MASS NUCLEI; ISOTOPES; NUCLEI; NUMERICAL DATA; ODD-EVEN NUCLEI; OPTICAL PROPERTIES; PHASE TRANSFORMATIONS; PHYSICAL PROPERTIES; PNICTIDES; RADIATION EFFECTS; STABLE ISOTOPES; SURFACE PROPERTIES