Published 1988 | Version v1
Report Open

Simulation of sputtering of multicomponent solids by ion bombardment: program system PERST

Creators

Description

Basic version of problem-oriented program system PERST for simulation of sputtering of multicomponent solids by ions heavier than lithium in the kinetic energy range of 50 eV -500 keV at incidence angle of 0-90 deg C is developed. PERST system as a program product is described. Particular attention is paid to automation of programs formation for research work. 13 refs.; 1 fig.; 1 tab

Availability note (English)

MF available from INIS under the Report Number.

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Additional details

Additional titles

Original title (Russian)
Моделирование распыления многокомпонентных твердых тел ионной бомбардировкой: программная система PERST

Publishing Information

Imprint Pagination
12 p.
Report number
KFTI--88-25

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
21084119
Subject category
S99: GENERAL AND MISCELLANEOUS;
Descriptors DEI
ALGORITHMS; COMPUTER CALCULATIONS; COMPUTERIZED SIMULATION; ION BEAMS; PHYSICAL RADIATION EFFECTS; SOLIDS; SPUTTERING
Descriptors DEC
BEAMS; RADIATION EFFECTS; SIMULATION