Published 1971 | Version v1
Book

Effect of a low energy ion bombardment on the characteristics of Schottky barriers

  • 1. Laboratoires d'Electronique et de Physique Appliquee (LEP), 94 - Limeil-Brevannes (France)

Description

no abstract available

Additional details

Additional titles

Original title (French)
Influence d'un bombardement ionique de faible energie sur les caracteristiques des barrieres Schottky

Publishing Information

Publisher
Societe Francaise des Ingenieurs et Techniciens du Vide.
Imprint Place
Paris, France
Imprint Title
International colloquium on the application of vacuum techniques to the semiconductor industry electronic and microelectronic components. AVISEM 71
Imprint Pagination
p. 80-85.

Conference

Title
International colloquium on the application of vacuum techniques to the semiconductor industry electronic and microelectronic components. AVISEM 71.
Dates
13 Sep 1971.
Place
Versailles, France.

INIS

Country of Publication
France
Country of Input or Organization
France
INIS RN
3024573
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY; S46: INSTRUMENTATION RELATED TO NUCLEAR SCIENCE AND TECHNOLOGY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
ARSENIC COMPOUNDS; GALLIUM COMPOUNDS; ION BEAMS; RADIATION EFFECTS; RARE GASES; SEMICONDUCTOR DIODES; SEMICONDUCTOR JUNCTIONS
Descriptors DEC
BEAMS; ELEMENTS; NONMETALS; SEMICONDUCTOR DEVICES

Optional Information

Notes
Imprint:Colloque international sur les applications des techniques du vide a l'industrie des semiconducteurs, des composants electroniques et de la microelectronique. AVISEM 71.