Published May 15, 2000 | Version v1
Journal article

Elemental mapping with an X-ray fluorescence imaging microscope

  • 1. Institute of Applied Physics, University of Tsukuba, 1-1-1, Tennoudai, Tsukuba, Ibaraki, 305-8573 (Japan)

Description

An X-ray fluorescence (XRF) imaging microscope with a Wolter-type grazing-incidence mirror as an objective was constructed at the beamline 39XU of SPring-8 (8 GeV, 70 mA) at Japan Synchrotron Radiation Institute. The monochromatic undulator X-rays in the energy range of 6-10 keV were used to produce XRF of a specimen. The microscope system was set normal to the incident beam to reduce elastic scattering from a specimen and to improve signal/background ratio. The two-dimensional elemental mappings of a test specimen (Cu, Ni, Fe wires) and inclusions (Fe, Co, Ni) in a synthesized diamond could be obtained by utilizing the absorption edges of the corresponding elements

Additional details

Identifiers

Publishing Information

Journal Title
AIP Conference Proceedings
Journal Volume
507
Journal Issue
1
Journal Page Range
p. 259-262
ISSN
0094-243X
CODEN
APCPCS

Conference

Title
6. international conference on X-ray microscopy
Dates
2-6 Aug 1999
Place
Berkeley, CA (United States)

Optional Information

Notes
(c) 2000 American Institute of Physics.