Published 2007
| Version v1
Miscellaneous
Open
Radiation-induced formation of silicon nitride in silicon at sequential irradiation by nitrogen and argon ions
- 1. Nizhegorodskij Gosudarstvennyj Univ. im. N.I. Lobachevskogo, Nizhnij Novgorod (Russian Federation)
Description
no abstract available
Files
39043449.pdf
Files
(30.2 kB)
| Name | Size | Download all |
|---|---|---|
|
md5:2c4a667cadcac279431f404859bef7e5
|
30.2 kB | Preview Download |
System files
(4.3 kB)
| Name | Size | Download all |
|---|
Additional details
Additional titles
- Original title (Russian)
- Радиационно-стимулированное формирование нитрида кремния в кремнии при последовательном облучении пучками ионов азота и аргона
Publishing Information
- Publisher
- Universitetskaya kniga
- Imprint Place
- Moscow (Russian Federation)
- Imprint Title
- Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals
- Imprint Pagination
- 178 p.
- Journal Page Range
- p. 147
- Report number
- INIS-RU--505
Conference
- Title
- 37. International conference on physics of interaction of charged particles with crystals
- Original Conference Title
- XXXVII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
- Dates
- 29-31 May 2007
- Place
- Moscow (Russian Federation)
INIS
- Country of Publication
- Russian Federation
- Country of Input or Organization
- Russian Federation
- INIS RN
- 39043449
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- No Abstract, Conference, Numerical Data
- Descriptors DEI
- ANNEALING; ARGON IONS; BLISTERS; DISLOCATIONS; EXPERIMENTAL DATA; ION BEAMS; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; SILICON; SILVER NITRIDES
- Descriptors DEC
- BEAMS; CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA; DOSES; ELEMENTS; HEAT TREATMENTS; INFORMATION; IONS; LINE DEFECTS; NITRIDES; NITROGEN COMPOUNDS; NUMERICAL DATA; PNICTIDES; RADIATION EFFECTS; SEMIMETALS; SILVER COMPOUNDS; TRANSITION ELEMENT COMPOUNDS
Optional Information
- Notes
- 2 refs. Imprint:Tezisy dokladov XXXVII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami