Published 2007 | Version v1
Miscellaneous Open

Radiation-induced formation of silicon nitride in silicon at sequential irradiation by nitrogen and argon ions

  • 1. Nizhegorodskij Gosudarstvennyj Univ. im. N.I. Lobachevskogo, Nizhnij Novgorod (Russian Federation)

Description

no abstract available

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Part of:
Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals

Additional details

Additional titles

Original title (Russian)
Радиационно-стимулированное формирование нитрида кремния в кремнии при последовательном облучении пучками ионов азота и аргона

Publishing Information

Publisher
Universitetskaya kniga
Imprint Place
Moscow (Russian Federation)
Imprint Title
Summaries of reports of XXXVII International conference on physics of interaction of charged particles with crystals
Imprint Pagination
178 p.
Journal Page Range
p. 147
Report number
INIS-RU--505

Conference

Title
37. International conference on physics of interaction of charged particles with crystals
Original Conference Title
XXXVII mezhdunarodnaya konferentsiya po fizike vzaimodejstviya zaryazhennykh chastits s kristallami
Dates
29-31 May 2007
Place
Moscow (Russian Federation)

INIS

Country of Publication
Russian Federation
Country of Input or Organization
Russian Federation
INIS RN
39043449
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract, Conference, Numerical Data
Descriptors DEI
ANNEALING; ARGON IONS; BLISTERS; DISLOCATIONS; EXPERIMENTAL DATA; ION BEAMS; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; RADIATION DOSES; SILICON; SILVER NITRIDES
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTAL DEFECTS; CRYSTAL STRUCTURE; DATA; DOSES; ELEMENTS; HEAT TREATMENTS; INFORMATION; IONS; LINE DEFECTS; NITRIDES; NITROGEN COMPOUNDS; NUMERICAL DATA; PNICTIDES; RADIATION EFFECTS; SEMIMETALS; SILVER COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Notes
2 refs. Imprint:Tezisy dokladov XXXVII mezhdunarodnoj konferentsii po fizike vzaimodejstviya zaryazhennykh chastits s kristallami