Published July 7, 1997 | Version v1
Journal article

An x-ray spectromicroscopic study of the local structure of patterned titanium silicide

Description

no abstract available

Additional details

Publishing Information

Journal Title
Applied Physics Letters
Journal Volume
71
Journal Issue
1
Journal Page Range
[10 p.]
ISSN
0003-6951
CODEN
APPLAB

INIS

Country of Publication
United States
Country of Input or Organization
United States
INIS RN
33063795
Subject category
S36: MATERIALS SCIENCE;
Resource subtype / Literary indicator
No Abstract
Descriptors DEI
ELECTRONIC STRUCTURE; MICROSCOPY; STRUCTURAL CHEMICAL ANALYSIS; TITANIUM SILICIDES; X-RAY SPECTROSCOPY
Descriptors DEC
SILICIDES; SILICON COMPOUNDS; SPECTROSCOPY; TITANIUM COMPOUNDS; TRANSITION ELEMENT COMPOUNDS

Optional Information

Contract/Grant/Project number
AC03-76SF00098
Notes
Journal Publication Date: July 7 1997
Funding organization
US Department of Energy (United States)
Secondary number(s)
LBNL/ALS--879