Published July 1990 | Version v1
Journal article Metadata-only

Inelastic sputtering by fast multicharged ions

Creators

  • 1. Gosudarstvennyj Komitet po Ispol'zovaniyu Atomnoj Ehnergii SSSR, Moscow (USSR). Inst. Atomnoj Ehnergii

Description

A theory of inelastic sputtering of metals and dielectrics by fast multicharged ions is discussed. Mechanisms of electron subsystem excitation and relaxation are considered, the sputtering coefficients for monocrystals and fine crystalline targets are determined

Additional details

Additional titles

Original title (Russian)
Неупругое распыление быстрыми многозарядными ионами

Publishing Information

Journal Title
Izvestiya Akademii Nauk SSSR, Seriya Fizicheskaya
Journal Volume
54
Journal Issue
7
Series
Izv. Akad. Nauk SSSR, Ser. Fiz.
Journal Page Range
1262-1266
ISSN
0367-6765
CODEN
IANFA

Conference

Title
9. All-Union conference on interaction of atomic particles with solids.
Dates
11-13 Oct 1989.
Place
Moscow (USSR).

INIS

Country of Publication
Russian Federation
Country of Input or Organization
USSR
INIS RN
22057354
Subject category
S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
Resource subtype / Literary indicator
Conference
Descriptors DEI
DIELECTRIC MATERIALS; DISTRIBUTION FUNCTIONS; ION BEAMS; METALS; MONOCRYSTALS; MULTICHARGED IONS; SOLID-STATE PLASMA; SPUTTERING
Descriptors DEC
BEAMS; CHARGED PARTICLES; CRYSTALS; ELEMENTS; IONS; MATERIALS; PLASMA