New 2-stage ion microprobes and a move to higher energies

Recent moves in Ion Beam Microanalysis towards the use of a rapidly growing number of very high resolution, low current and single ion techniques has led to the need for high demagnification and greatly improved beam quality. There is also a move to apply Microbeams at higher energies and with heavier ions. This also puts demands on the focusing system and beam control. This paper describes the recent development of 2-stage lens systems to be applied here and overseas, both at very high resolution and at high energies with heavy ions. It looks at new ion beam analysis applications of such ion microprobes. 8 refs., 1 tab., 1 fig