Published July 1, 2008
| Version v1
Journal article
Use of ultra-thin organic silane films for the improvement of gold adhesion to the silicon dioxide wafers for (bio)sensor applications
Creators
- 1. Laboratoire de Physique de Semi-conducteurs et Capteurs, IPEST la Marsa 2070 Tunis (Tunisia)
- 2. Institut Superieur des Sciences, Appliquees et de Technologies, Cite Taffela-Ebn Kaldoun, 4003-Tunisia (Tunisia)
- 3. LSA, Universite Claude Bernard Lyon 1, 43 Boulevard du 11 Novembre 1918, 69622 Villeurbanne Cedex (France)
- 4. IRCELYON, Universite Claude Bernard-Lyon 1.43 Bd du 11 novembre 1918 69622 Villeurbane Cedex (France)
- 5. AMPERE, Ecole Centrale de Lyon, 69134 Ecully Cedex (France)
Description
A mono-functional silane reagent, 3-mercaptopropyltrimethoxysilane (MPS) was used to modify the surface of silicon wafers. The structure of the SAMs formed with the MPS was investigated by contact angle measurements, ellipsometry, AFM, and X-ray photoelectron spectroscopy (XPS). The deposition of a metallic gold layer via ultra-high vacuum (UHV) evaporation reveals good adhesion properties on Au/MPS/SiO2/Si structure. The 'chemisorption' between the SAM and the gold evaporated layer is confirmed by adhesion tests and optimum curing treatment is found 1 h at 100 deg. C). This very simple methodology, avoiding the usage of Cr and other metals as undercoating layers and could be proposed further for (bio)sensors applications
Availability note (English)
Available from http://dx.doi.org/10.1016/j.msec.2007.10.048Additional details
Identifiers
- DOI
- 10.1016/j.msec.2007.10.048;
- PII
- S0928-4931(07)00168-3;
Publishing Information
- Journal Title
- Materials Science and Engineering. C, Biomimetic Materials, Sensors and Systems
- Journal Volume
- 28
- Journal Issue
- 5-6
- Journal Page Range
- p. 628-632
- ISSN
- 0928-4931
Conference
- Title
- 5. Maghreb-Europe meeting on materials and their applications for devices and physical, chemical and biological sensors
- Acronym
- MADICA 2006 conference
- Dates
- 30 Oct - 1 Nov 2006
- Place
- Mahdia (Tunisia)
INIS
- Country of Publication
- Netherlands
- Country of Input or Organization
- International Atomic Energy Agency (IAEA)
- INIS RN
- 40028158
- Subject category
- S36: MATERIALS SCIENCE;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ADHESION; ATOMIC FORCE MICROSCOPY; CHEMISORPTION; CURING; DEPOSITION; ELLIPSOMETRY; EVAPORATION; FILMS; GOLD; LAYERS; REAGENTS; SENSORS; SILANES; SILICON; SILICON OXIDES; X-RAY PHOTOELECTRON SPECTROSCOPY
- Descriptors DEC
- CHALCOGENIDES; CHEMICAL REACTIONS; ELECTRON SPECTROSCOPY; ELEMENTS; HYDRIDES; HYDROGEN COMPOUNDS; MEASURING METHODS; METALS; MICROSCOPY; ORGANIC COMPOUNDS; ORGANIC SILICON COMPOUNDS; OXIDES; OXYGEN COMPOUNDS; PHASE TRANSFORMATIONS; PHOTOELECTRON SPECTROSCOPY; SEMIMETALS; SEPARATION PROCESSES; SILICON COMPOUNDS; SORPTION; SPECTROSCOPY; TRANSITION ELEMENTS
Optional Information
- Copyright
- Copyright (c) 2007 Elsevier Science B.V., Amsterdam, The Netherlands, All rights reserved.