Published 2006
| Version v1
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Influence of Coulon interaction on space resolution of changed particle nanobeams in modern lithographic systems and scanning probe
Description
no abstract available
Files
38008005.pdf
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Additional details
Additional titles
- Original title (Russian)
- Влияние эффектов кулоновского взаимодействия на пространственное разрешение нанопучков заряженных частиц в современных системах литографии и сканирующего зонда
Publishing Information
- Imprint Title
- Theses of reports 'IV Conference of high energy physics, nuclear physics and accelerators'
- Imprint Pagination
- 96 p.
- Journal Page Range
- p. 66
- Report number
- INIS-UA--102
Conference
- Title
- 4. Conference of high energy physics, nuclear physics and accelerators
- Original Conference Title
- 4. Konferentsiya po fizike vysokikh ehnergij, yadernoj fizike i uskoritelyam
- Dates
- 27 Feb - 3 Mar 2006
- Place
- Khar'kov (Ukraine)
INIS
- Country of Publication
- Ukraine
- Country of Input or Organization
- Ukraine
- INIS RN
- 38008005
- Subject category
- S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
- Resource subtype / Literary indicator
- Conference, No Abstract
- Descriptors DEI
- COULOMB SCATTERING; ELECTRON BEAMS; NANO AMP BEAM CURRENTS; PROBES; PROTON BEAMS
- Descriptors DEC
- BASIC INTERACTIONS; BEAM CURRENTS; BEAMS; CURRENTS; ELASTIC SCATTERING; ELECTROMAGNETIC INTERACTIONS; INTERACTIONS; LEPTON BEAMS; NUCLEON BEAMS; PARTICLE BEAMS; SCATTERING
Optional Information
- Notes
- Imprint:Tezisy dokladov 4 Konferentsii po fizike vysokikh ehnergij, yadernoj fizike i uskoritelyam