Published 2006 | Version v1
Miscellaneous Open

Influence of Coulon interaction on space resolution of changed particle nanobeams in modern lithographic systems and scanning probe

  • 1. Institut prikladnoj fiziki, Sumy (Ukraine)

Description

no abstract available

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Part of:
Theses of reports 'IV Conference of high energy physics, nuclear physics and accelerators'

Additional details

Additional titles

Original title (Russian)
Влияние эффектов кулоновского взаимодействия на пространственное разрешение нанопучков заряженных частиц в современных системах литографии и сканирующего зонда

Publishing Information

Imprint Title
Theses of reports 'IV Conference of high energy physics, nuclear physics and accelerators'
Imprint Pagination
96 p.
Journal Page Range
p. 66
Report number
INIS-UA--102

Conference

Title
4. Conference of high energy physics, nuclear physics and accelerators
Original Conference Title
4. Konferentsiya po fizike vysokikh ehnergij, yadernoj fizike i uskoritelyam
Dates
27 Feb - 3 Mar 2006
Place
Khar'kov (Ukraine)

INIS

Country of Publication
Ukraine
Country of Input or Organization
Ukraine
INIS RN
38008005
Subject category
S73: NUCLEAR PHYSICS AND RADIATION PHYSICS;
Resource subtype / Literary indicator
Conference, No Abstract
Descriptors DEI
COULOMB SCATTERING; ELECTRON BEAMS; NANO AMP BEAM CURRENTS; PROBES; PROTON BEAMS
Descriptors DEC
BASIC INTERACTIONS; BEAM CURRENTS; BEAMS; CURRENTS; ELASTIC SCATTERING; ELECTROMAGNETIC INTERACTIONS; INTERACTIONS; LEPTON BEAMS; NUCLEON BEAMS; PARTICLE BEAMS; SCATTERING

Optional Information

Notes
Imprint:Tezisy dokladov 4 Konferentsii po fizike vysokikh ehnergij, yadernoj fizike i uskoritelyam