Published 1989
| Version v1
Journal article
Annealing of ion induced damage and alteration of composition in the near-surface of ion-implanted LiNbO3
Creators
- 1. Academia Sinica, Shanghai SH, (China). Shanghai Inst. of Metallurgy
- 2. Academia Sinica, Shanghai, SH (China). Shanghai Inst. of Ceramics
Description
High dose implantation of Xe+, Ar+ and N+ at room temperature causes near-surface decomposition. Precipitates were formed at the surfaces when they were exposed to the atmosphere. The characteristics of this effect were studied using SIMS, IRA and SEM. The mechanisms of the decomposition are discussed. (author)
Additional details
Publishing Information
- Journal Title
- Vacuum
- Journal Volume
- 39
- Journal Issue
- 2-4
- Series
- Vacuum.
- Journal Page Range
- 287-288
- ISSN
- 0042-207X
- CODEN
- VACUA
Conference
- Title
- international symposium on applications of ion beams produced by small accelerators.
- Acronym
- Ion beam interactions with matter
- Dates
- 20-24 Oct 1987.
- Place
- Jinan (China).
INIS
- Country of Publication
- United Kingdom
- Country of Input or Organization
- United Kingdom
- INIS RN
- 20053932
- Subject category
- S75: CONDENSED MATTER PHYSICS, SUPERCONDUCTIVITY AND SUPERFLUIDITY;
- Resource subtype / Literary indicator
- Conference
- Descriptors DEI
- ANNEALING; ARGON IONS; CHEMICAL COMPOSITION; CHEMICAL REACTION KINETICS; DECOMPOSITION; DOSE RATES; ION IMPLANTATION; LITHIUM COMPOUNDS; NIOBATES; NITROGEN IONS; PHYSICAL RADIATION EFFECTS; PRECIPITATION; SURFACE TREATMENTS; XENON IONS
- Descriptors DEC
- ALKALI METAL COMPOUNDS; CHARGED PARTICLES; CHEMICAL REACTIONS; HEAT TREATMENTS; IONS; KINETICS; NIOBIUM COMPOUNDS; OXYGEN COMPOUNDS; RADIATION EFFECTS; REACTION KINETICS; SEPARATION PROCESSES; TRANSITION ELEMENT COMPOUNDS