Study on the crystallization of Mg₃₅Sb₆₅/Sn₁₅Sb₈₅ superlattice-like films for phase change memory application

In this paper, the Mg₃₅Sb₆₅/Sn₁₅Sb₈₅ superlattice-like films were prepared by magnetron sputtering and the comprehensive properties of were systematically studied. The amorphous-to-crystalline transformation was researched with a situ resistance–temperature measurement system to evaluate the thermal stability. X-ray diffraction, Raman and transmission electron microscopy were employed to explore the change of phase structure at different annealing temperatures. The reversible resistance switching was achieved for [MgSb(7 nm)/SnSb(3 nm)]₅-based devices. The results showed that Mg₃₅Sb₆₅/Sn₁₅Sb₈₅ superlattice-like film was a promising phase change material with good thermal stability, fast phase transition and low power consumption.