Study on fabrication of three dimensional micro-structural ceramics by SR and ion-beams, and expression of new functions

Two micro-processing technologies needed for optical component processing, have been conducted targeting to TiO2. One is fast and heavy ion method, and another is X-ray lithography and liquid phase precipitation method. In the ion processing, relationship between etching depth and electron stopping power of 42 MeV Cu ions was examined. And TiO2 structure with two dimensional patterns was fabricated by the following method; TiO2 was precipitated in the PMMA (polymethyl methacrylate) mold and then, the mold was removed selectively. A fabricating method of three dimensional PMMA mold for making three dimensional structures was also studied. (A. Hishinuma)